Nanofabrication, effects and sensors based on micro-electro-mechanical systems technology

Nanofabrication, effects and sensors based on micro-electro-mechanical systems technology.

In this paper, our investigation of nanofabrication, effects and sensors based on the traditional micro-electro-mechanical systems (MEMS) technology has been reviewed. Thanks to high selectivity in anisotropic etching and sacrificial layer processes, nanostructures such as nanobeams and nanowires have been fabricated in top-down batch process, in which beams with thickness of only 20 nm and nan...

cn Nanofabrication , effects and sensors based on micro - electro - mechanical systems technology

In this paper, our investigation of nanofabrication, effects and sensors based on the traditional microelectro-mechanical systems (MEMS) technology has been reviewed. Thanks to high selectivity in anisotropic etching and sacrificial layer processes, nanostructures such as nanobeams and nanowires have been fabricated in top-down batch process, in which beams with thickness of only 20 nm and nano...

Application of Inkjet-Printing Technology to Micro- Electro-Mechanical Systems

Application of Inkjet-Printing Technology to Micro-Electro-Mechanical Systems

Micro - Electro - Mechanical - Systems ( Mems )

Batch Mode Micromanufacturing Based on Micro Electro-discharge Machining and Micro Ultrasonic Machining for Micro Electro Mechanical Systems (mems)

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...